Oxygen Service Vacuum Pumps

Harrick PlasmaVacuum PumpsOxygen Service Vacuum Pumps

Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (23 L/min) and an ultimate total pressure of 200 mTorr (0.27 mbar) or less.

Suitable for pumping concentrated oxygen gas as well as nonreactive or inert gases (e.g. Air, N2, Ar).
Does not use hydrocarbon oil (the combination of concentrated oxygen and hydrocarbon oil is an explosion hazard).

Economy Dry Oxygen pump

PDC-OPE (115V) | PDC-OPE-2 (230V)

Uses no oil or fluid
Pumping speed (50/60 Hz): 3.0/3.6 m3/hr
Ultimate total pressure: 250 mTorr (pump manufacturer specification; in our lab tests, ultimate pressures of <100 mTorr were attained)
Motor power (50/60 Hz): 120 W
Weight: 21 lbs
Dimensions: 7″ H x 14″ W x 5.5″ D
Pump inlet: includes hose, hose clamps, hose adaptor, centering ring and swing clamp to connect plasma cleaner to pump inle

PDC-OPE-OLT
Optional pump outlet connection to conduct pump exhaust to a vent hood
Includes 9 ft. length exhaust hose (other lengths may be specified)

DRY OXYGEN PUMP

PDC-OPD (115V) | PDC-OPD-2 (230V)

Uses no oil or fluid
Pumping speed (50/60 Hz): 6.2 m3/hr
Ultimate total pressure (gas ballast closed; 50/60 Hz): 15 mTorr
Ultimate total pressure (gas ballast open; 50/60 Hz): 38 mTorr
Motor power (50/60 Hz): 260 W
Weight: 58 lbs
Dimensions: 12″ H x 17″ W x 11″ D
Pump inlet: includes hose, hose clamps, hose adaptor, centering ring and swing clamp to connect plasma cleaner to pump inlet

PDC-OP-OLT
Optional pump outlet connection to conduct pump exhaust to a vent hood
Includes 9 ft. length exhaust hose (other lengths may be specified)

Fomblin-Based Oxygen pump

PDC-OPF (115V) | PDC-OPF-2 (230V)

(not including Fomblin Fluid)
Pumping speed (50/60 Hz): 3.3/3.9 m3/hr
Ultimate total pressure (gas ballast closed): 1.5 mTorr
Ultimate total pressure (gas ballast open): 90 mTorr
Motor power (50/60 Hz): 250/300 W
Weight: 48 lbs
Dimensions: 9″ H x 17″ W x 6″ D
Integrated inlet check valve
Pump inlet: includes hose, hose clamps, hose adaptor, centering ring and swing clamp to connect plasma cleaner to pump inlet
Pump outlet: includes oil mist filter to filter oil vapor from pump exhaust

PDC-FMB (1kg; 0.532L)
Fomblin Fluid for Fomblin-Based Vacuum Pump PDC-OPF, PDC-OPF-2

PDC-OP-OLT
Optional pump outlet connection to conduct pump exhaust to a vent hood Includes 9 ft. length exhaust hose (other lengths may be specified)

Harrick Plasma is a leading supplier of plasma equipment to the research community. We have been providing quality tabletop plasma devices specifically designed for laboratory and R&D use for over 30 years.