Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (23 L/min) and an ultimate total pressure of 200 mTorr (0.27 mbar) or less.
Oil-Based Vacuum Pumps
Rotary vane pumps with hydrocarbon pump oil (included with pump). Suitable for pumping nonreactive or inert gases (e.g. Air, N2 or Ar). For corrosive or reactive gases, consult with us directly
Oxygen Service Vacuum Pumps
Suitable for pumping concentrated oxygen gas as well as nonreactive or inert gases (e.g. Air, N2, Ar). Does not use hydrocarbon oil (the combination of concentrated oxygen and hydrocarbon oil is an explosion hazard).