Oil-Based VACUUM PUMPS
Harrick Plasma → Vacuum Pumps →
Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (23 L/min) and an ultimate total pressure of 200 mTorr (0.27 mbar) or less.
Rotary vane pumps with hydrocarbon pump oil are suitable for pumping nonreactive or inert gases (e.g. Air, N2 or Ar). These pumps are not intended for pumping oxygen; see our Oxygen Service Pumps. For corrosive or reactive gases, consult with us directly.
Basic Oil-based Vacuum PUMP
PDC-VPE (115V) | PDC-VPE-2 (230V)
Basic Model (lower cost)
Pumping Speed (50/60 Hz): 5.1 m3/hr
Ultimate Total Pressure (gas ballast closed): 7.5 mTorr
Ultimate Total Pressure (gas ballast open): 150 mTorr
Motor Power (50/60 Hz): 373 W
Weight: 27 lbs
Size: 9.75″ H x 14″ W x 5.5″ D
Pump inlet: includes check valve, hose, hose clamps, and hose adaptor to connect plasma cleaner to pump inlet
Pump outlet: includes oil mist filter to filter oil vapor from pump exhaust
PDC-VPE-OIL (1 quart) Replacement pump oil
Pumping Speed (50/60 Hz): 5.1 m3/hr
Ultimate Total Pressure (gas ballast closed): 7.5 mTorr
Ultimate Total Pressure (gas ballast open): 150 mTorr
Motor Power (50/60 Hz): 373 W
Weight: 27 lbs
Size: 9.75″ H x 14″ W x 5.5″ D
Pump inlet: includes check valve, hose, hose clamps, and hose adaptor to connect plasma cleaner to pump inlet
Pump outlet: includes oil mist filter to filter oil vapor from pump exhaust
PDC-VPE-OIL (1 quart) Replacement pump oil