Plasma Videos
Plasma Cleaner Operation
Plasma Cleaner Installation
You Will Need
- Harrick Plasma Cleaner
- Gas Compatible Pump
(Minimum pumping speed of 23 L/min) - Custom 3-way Valve
- 3Ft Vacuum Rated Hose
- 2x Hose Clamps
- Swing Clamp
- Centering Ring
- Exhaust Hose and Clamps
Recommendations
- Do NOT use Vacuum Grease on any of the vacuum connections as it is source of contamination.
- The Material of the Vacuum Hose and Connections must be compatible with the gas(es) used.
- Keep Vacuum hose length as short as possible to minimize the time required to evacuate the chamber.
- When connecting NPT tapered threads (3-way Valve), wrap the thread with PTFE (Teflon) tape for a good seal. Wrap counter to the screw direction.
- Tighten ALL connections with a wrench
Fluorescent Bulb Test
You Will Need
- Harrick Plasma Cleaner
- 6 Inch F4T5 Fluorescent Lightbulb
Recommendations
Place the fluorescent bulb inside the chamber. Leave the door open (this test is performed at atmospheric pressure). Turn on the main power, wait 10-15 seconds, and turn on the RF power (start at HI, followed by MED, followed by LOW), waiting up to 10 seconds at each RF power level. If the bulb glows on all three RF power settings, the electronic system is functioning properly; proceed to test the vacuum system.
If the electronics test fails, contact Harrick Plasma.
PDMS Bonding (Plasma Cleaner Operation)
You Will Need
- Installed Harrick Plasma Cleaner (All 3 Harrick Plasma Cleaners have been used for PDMS bonding applications)
- Gas Compatible Pump
(Minimum pumping speed of 23 L/min) - PDMS Microfluidic Devices
- Glass Slide
Recommendations
PROCESS CONDITIONS: 200 mTorr, High, 50 seconds
- GAS: Air or Oxygen from a cylinder
- Do not touch surfaces to be bonded. Particulates or contamination disrupt bond formation.
- Heat the assembled device at 80-100 degrees Celsius for 60 seconds (Hot Plate or Oven). The high temperature provides activation energy for additional bond formation.
PROCEDURE FOR PLASMA TREATMENT:
- Insert samples into chamber
- Turn on main Power to allow vacuum tubes to warm up.
- In the meantime, pump down for 1-2 minutes or to your desired vacuum pressure.
- Open the metering valve or needle valve to your desired setting or pressure.
- Allow the pressure to stabilize for 10-30 s.
- Turn on RF power to desired level.
- After 5-10 seconds, you should observe a purple-pink glow (if using air) when you look into the chamber.
- Start timing the plasma treatment once you see the plasma glow. Run the process for x seconds.
- Turn off the RF power and main power.
- Turn off the pump and slowly vent the chamber. *
- Open door and remove samples from the chamber.
* Opening the vent too quickly may cause lighter and more fragile samples (Glass Slides) to move and break inside the chamber