HARRICK PLASMA

PlasmaFlo Gas Flow Mixer

PDC-FMG / PDC-FMG-2

The PlasmaFlo is an optional accessory that may be used with any of our plasma cleaners. The PlasmaFlo provides more precise, quantitative control of the gas flowrate and monitoring of vacuum pressure, both of which are beneficial for process consistency. A second gas source can also be added without having to manually swap gas line.

Features

PDC-FMG (115V); PDC-FMG-2 (230V)
Dual gas feeds for gas mixing or independent control of two process gases
Dual process gas flowmeters
49 mL/min maximum flowrate for atmospheric air at 0 psig*
± 2% full scale accuracy
Thermocouple vacuum gauge sensor connects to plasma cleaner door
Digital meter displays pressure range of 1 mTorr to 760 Torr
Weight: 7 lbs
Size: 8.5" H x 10" W x 8" D

* Maximum flowrate varies with process gas and regulated pressure. Correlated flowrate tables are available for the most common process gases (Air, Ar, N2, O2) used with our Plasma Cleaners and metered at 10 psig. Flowrate tables for other process gases and regulated pressures can be made available. Please inquire with Harrick Plasma.