Product Operation

PDMS Bonding (Microfluidic Device Fabrication)

You Will Need

  • Installed Harrick Plasma Cleaner (All 3 Harrick Plasma Cleaners have been used for PDMS bonding applications)
  • Gas Compatible Pump
    (Minimum pumping speed of 23 L/min)
  • PDMS Microfluidic Devices
  • Glass Slide

Recommendations

  • PROCESS CONDITIONS: 200 mTorr, High, 50 seconds

  • GAS: Air or Oxygen from a cylinder
  • Do not touch surfaces to be bonded. Particulates or contamination disrupt bond formation. 
  • Heat the assembled device at 80-100 degrees Celsius for 60 seconds (Hot Plate or Oven). The high temperature provides activation energy for additional bond formation.

PROCEDURE FOR PLASMA TREATMENT:

  1. Insert samples into chamber
  2. Turn on main Power to allow vacuum tubes to warm up.
  3.  In the meantime, pump down for 1-2 minutes or to your desired vacuum pressure.
    • Open the metering valve or needle valve to your desired setting or pressure.
    • Allow the pressure to stabilize for 10-30 s.
    • Turn on RF power to desired level.
  1. After 5-10 seconds, you should observe a purple-pink glow (if using air) when you look into the chamber.
  2. Start timing the plasma treatment once you see the plasma glow. Run the process for x seconds.
  3. Turn off the RF power and main power.
  4. Turn off the pump and slowly vent the chamber. *
  5. Open door and remove samples from the chamber.

 * Opening the vent too quickly may cause lighter and more fragile samples (Glass Slides) to move and break inside the chamber

Harrick Plasma is a leading supplier of plasma equipment to the research community. We have been providing quality tabletop plasma devices specifically designed for laboratory and R&D use for over 30 years.