- Expanded Plasma Cleaner
(or High Power Expanded Plasma Cleaner)
- Gas Compatible Pump
(Minimum pumping speed of 23 L/min)
- Custom 3-way Valve
- 3Ft Vacuum Rated Hose
- 2x Hose Clamps
- Swing Clamp
- Centering Ring
- Exhaust Hose and Clamps
- Do NOT use Vacuum Grease on any of the vacuum connections as it is source of contamination.
- The Material of the Vacuum Hose and Connections must be compatible with the gas(es) used.
- Keep Vacuum hose length as short as possible to minimize the time required to evacuate the chamber.
- When connecting NPT tapered threads (3-way Valve), wrap the thread with PTFE (Teflon) tape for a good seal. Wrap counter to the screw direction.
- Tighten ALL connections with a wrench