The PDC-32G Basic Plasma Cleaner is our most compact, inexpensive benchtop plasma cleaner. It has maximum applied power of 18W and a 3" dia x 6.5" L (75mm dia x 170mm L) chamber.

The PDC-32G-2 Basic Plasma Cleaner is our most compact, inexpensive benchtop plasma cleaner. It has maximum applied power of 18W and a 3" dia x 6.5" L (75mm dia x 170mm L) chamber.

The PDC-32G-2 CE Basic Plasma Cleaner is our most compact, inexpensive benchtop plasma cleaner. It has maximum applied power of 18W and a 3" dia x 6.5" L (75mm dia x 170mm L) chamber.

The PDC-001 Expanded Plasma Cleaner is suitable for nanoscale surface cleaning (with organic material etch rate of 5-10 nm/min) and surface activation. The PDC-001 has maximum applied power of 30W and a 6" diameter x 6.5" length (150mm diameter x 170mm length) chamber.

The PDC-002 Expanded Plasma Cleaner is suitable for nanoscale surface cleaning (with organic material etch rate of 5-10 nm/min) and surface activation. The PDC-001 has maximum applied power of 30W and a 6" diameter x 6.5" length (150mm diameter x 170mm length) chamber.

The PDC-002-CE Expanded Plasma Cleaner is suitable for nanoscale surface cleaning (with organic material etch rate of 5-10 nm/min) and surface activation. The PDC-001 has maximum applied power of 30W and a 6" diameter x 6.5" length (150mm diameter x 170mm length) chamber.

The PDC-001-HP High Power Expanded Plasma Cleaner is our highest power plasma cleaner (maximum power of 45W) with organic contamination and polymer thin film etch rate of 7 nm/min and may be beneficial to customers who need to etch thin polymer films that are on the order of 100's nm thick. It can also be used for nanoscale surface cleaning and surface chemistry modification at LOW RF power setting.

The PDC-001-HP High Power Expanded Plasma Cleaner is our highest power plasma cleaner (maximum power of 45W) with organic contamination and polymer thin film etch rate of 7 nm/min and may be beneficial to customers who need to etch thin polymer films that are on the order of 100's nm thick. It can also be used for nanoscale surface cleaning and surface chemistry modification at LOW RF power setting.

The PDC-001-HP High Power Expanded Plasma Cleaner is our highest power plasma cleaner (maximum power of 45W) with organic contamination and polymer thin film etch rate of 7 nm/min and may be beneficial to customers who need to etch thin polymer films that are on the order of 100's nm thick. It can also be used for nanoscale surface cleaning and surface chemistry modification at LOW RF power setting.

The PDC-VPE Basic Vacuum Pump is an oil-based rotary vane pump that is compatible with air and inert gases (argon, nitrogen) but is NOT compatible with pure oxygen gas. Purchase of the pump includes accessories needed to connect the plasma chamber to the pump inlet (3 ft vacuum hose, hose clamps, pump inlet hose adapter/check valve). An oil mist filter for the pump outlet is also included to remove oil vapor from the pump exhaust before it enters the lab space.

The PDC-VPE-2 Basic Vacuum Pump is an oil-based rotary vane pump that is compatible with air and inert gases (argon, nitrogen) but is NOT compatible with pure oxygen gas. Purchase of the pump includes accessories needed to connect the plasma chamber to the pump inlet (3 ft vacuum hose, hose clamps, pump inlet hose adapter/check valve). An oil mist filter for the pump outlet is also included to remove oil vapor from the pump exhaust before it enters the lab space.

The PDC-VPE-2 Basic Vacuum Pump is an oil-based rotary vane pump that is compatible with air and inert gases (argon, nitrogen) but is NOT compatible with pure oxygen gas. Purchase of the pump includes accessories needed to connect the plasma chamber to the pump inlet (3 ft vacuum hose, hose clamps, pump inlet hose adapter/check valve). An oil mist filter for the pump outlet is also included to remove oil vapor from the pump exhaust before it enters the lab space.

The PDC-VP Premium Vacuum Pump is an oil-based rotary vane pump that uses hydrocarbon pump oil and is compatible with air and inert gases (the PDC-VP is NOT compatible with pure oxygen). Purchase of the vacuum pump included accessories to connect the plasma chamber to the pump inlet (vacuum hose, hose clamps, hose adapter for pump inlet and seals) as well as an oil mist filter at the pump outlet to remove oil vapor from the exhausted gas before it enters the lab space.

The PDC-VP-2 Premium Vacuum Pump is an oil-based rotary vane pump that uses hydrocarbon pump oil and is compatible with air and inert gases (the PDC-VP is NOT compatible with pure oxygen). Purchase of the vacuum pump included accessories to connect the plasma chamber to the pump inlet (vacuum hose, hose clamps, hose adapter for pump inlet and seals) as well as an oil mist filter at the pump outlet to remove oil vapor from the exhausted gas before it enters the lab space.

The PDC-VP-2 Premium Vacuum Pump is an oil-based rotary vane pump that uses hydrocarbon pump oil and is compatible with air and inert gases (the PDC-VP is NOT compatible with pure oxygen). Purchase of the vacuum pump included accessories to connect the plasma chamber to the pump inlet (vacuum hose, hose clamps, hose adapter for pump inlet and seals) as well as an oil mist filter at the pump outlet to remove oil vapor from the exhausted gas before it enters the lab space.

The PDC-OPE Economy Dry Oxygen Service Pump requires no oil or fluid and is compatible with pure oxygen, air, and inert gases (N2, Ar). The absence of pump oil eliminates the risk of oil backstreaming or contamination into the process chamber and requires less routine maintenance. The manufacturer recommends replacing the tip seal after about 9,000-10,000 hours of service. The manufacturers of the PDC-OPE lists an ultimate pressure of 250 mTorr, however, we have been able to reach 70-80 mTorr in 40-60 min in our lab tests.

The PDC-OPE-2 Economy Dry Oxygen Service Pump requires no oil or fluid and is compatible with pure oxygen, air, and inert gases (N2, Ar). The absence of pump oil eliminates the risk of oil backstreaming or contamination into the process chamber and requires less routine maintenance. The manufacturer recommends replacing the tip seal after about 9,000-10,000 hours of service. The manufacturers of the PDC-OPE lists an ultimate pressure of 250 mTorr, however, we have been able to reach 70-80 mTorr in 40-60 min in our lab tests.

The PDC-OPE-2 Economy Dry Oxygen Service Pump requires no oil or fluid and is compatible with pure oxygen, air, and inert gases (N2, Ar). The absence of pump oil eliminates the risk of oil backstreaming or contamination into the process chamber and requires less routine maintenance. The manufacturer recommends replacing the tip seal after about 9,000-10,000 hours of service. The manufacturers of the PDC-OPE lists an ultimate pressure of 250 mTorr, however, we have been able to reach 70-80 mTorr in 40-60 min in our lab tests.

The PDC-OPD Premium Oxygen Service Pump requires no oil or fluid and is compatible with pure oxygen, air, and inert gases (N2, Ar). The absence of pump oil eliminates the risk of oil backstreaming or contamination into the process chamber and minimizes routine maintenance. The manufacturer recommends replacing the tip seal after about 9,000-10,000 hours of service. The PDC-OPD reaches an ultimate pressure of 30-50 mTorr within 30-45 min.

The PDC-OPD-2 Premium Oxygen Service Pump requires no oil or fluid and is compatible with pure oxygen, air, and inert gases (N2, Ar). The absence of pump oil eliminates the risk of oil backstreaming or contamination into the process chamber and minimizes routine maintenance. The manufacturer recommends replacing the tip seal after about 9,000-10,000 hours of service. The PDC-OPD-2 reaches an ultimate pressure of 30-50 mTorr within 30-45 min.

The PDC-OPD-2 Premium Oxygen Service Pump requires no oil or fluid and is compatible with pure oxygen, air, and inert gases (N2, Ar). The absence of pump oil eliminates the risk of oil backstreaming or contamination into the process chamber and minimizes routine maintenance. The manufacturer recommends replacing the tip seal after about 9,000-10,000 hours of service. The PDC-OPD-2 reaches an ultimate pressure of 30-50 mTorr within 30-45 min.

The PDC-OPF Fomblin-based Oxygen Service Pump is a rotary vane pump that uses Fomblin fluid instead of the standard hydrocarbon oil and is stable under oxidizing environments. Fluid change is required every ~3000 hours of service.

The PDC-OPF Fomblin-based Oxygen Service Pump is a rotary vane pump that uses Fomblin fluid instead of the standard hydrocarbon oil and is stable under oxidizing environments. Fluid change is required every ~3000 hours of service.

The PDC-OPF Fomblin-based Oxygen Service Pump is a rotary vane pump that uses Fomblin fluid instead of the standard hydrocarbon oil and is stable under oxidizing environments. Fluid change is required every ~3000 hours of service.

The PDC-VCG Vacuum Gauge and Digital Meter is an optional accessory for monitoring vacuum pressure during plasma processing. The vacuum gauge sensor connects to the plasma cleaner front door with a separate digital display that reads a pressure range of 0.001 to 760 Torr. Monitoring the vacuum pressure during plasma processing is beneficial for process repeatability and helpful for troubleshooting vacuum-related issues in the plasma system.

The PDC-VCG-2 Vacuum Gauge and Digital Meter is an optional accessory for monitoring vacuum pressure during plasma processing. The vacuum gauge sensor connects to the plasma cleaner front door with a separate digital display that reads a pressure range of 0.001 to 760 Torr. Monitoring the vacuum pressure during plasma processing is beneficial for process repeatability and helpful for troubleshooting vacuum-related issues in the plasma system.

The PDC-FMG PlasmaFlo is recommended if you require more precise, quantitative control of the gas flow rate and monitoring of vacuum pressure. It includes 2 gas inputs into 2 flowmeters and allows for gas mixing or independent control of 2 different gases, and a vacuum gauge and digital meter to monitor pressure. The PlasmaFlo is also useful if you plan to add another gas line to plasma unit in the future and want to avoid having to swap gas lines.

The PDC-FMG-2 PlasmaFlo is recommended if you require more precise, quantitative control of the gas flow rate and monitoring of vacuum pressure. It includes 2 gas inputs into 2 flowmeters and allows for gas mixing or independent control of 2 different gases, and a vacuum gauge and digital meter to monitor pressure. The PlasmaFlo is also useful if you plan to add another gas line to plasma unit in the future and want to avoid having to swap gas lines.

The PDC-32T Quartz Sample Tray is 2.75"W x 6.5"L x 0.125" thick and provides a horizontal surface in the chamber to facilitate loading and unloading of small samples.

The PDC-32T Quartz Sample Tray is 2.75"W x 6.5"L x 0.125" thick and provides a horizontal surface in the chamber to facilitate loading and unloading of small samples.

The PDC-00T Quartz Sample Tray is 5.5"W x 6.5"L x 0.125" thick and provides a horizontal surface in the chamber to facilitate loading and unloading of small samples.

The PDC-00T Quartz Sample Tray is 5.5"W x 6.5"L x 0.125" thick and provides a horizontal surface in the chamber to facilitate loading and unloading of small samples.

The PDC-32T-P Pyrex Sample Tray is 2.75"W x 6.5"L x 0.125" thick and provides a horizontal surface in the chamber to facilitate loading and unloading of small samples.

The PDC-32T-P Pyrex Sample Tray is 2.75"W x 6.5"L x 0.125" thick and provides a horizontal surface in the chamber to facilitate loading and unloading of small samples.

The PDC-00T- P Pyrex Sample Tray is 5.5"W x 6.5"L x 0.125" thick and provides a horizontal surface in the chamber to facilitate loading and unloading of small samples.

The PDC-00T-P Pyrex Sample Tray is 5.5"W x 6.5"L x 0.125" thick and provides a horizontal surface in the chamber to facilitate loading and unloading of small samples.