Plasma Products:
Plasma Cleaners

 

 

Expanded Plasma Cleaner & PlasmaFlo™
Expanded Plasma Cleaner &
PlasmaFlo™  [+]

Basic Plasma Cleaner & PlasmaFlo™
Basic Plasma Cleaner &
PlasmaFlo™  [+]


Features

  • Compact, tabletop unit
  • Adjustable RF power
  • Low, Medium, and High power settings
  • Two Plasma Cleaner models available:
  • PDC-001 (115V); PDC-002 (230V)
    Expanded model
    Includes a 6" diameter x 6.5" length Pyrex chamber and an integral switch for a vacuum pump
    Its hinged cover features a magnetic closure and a viewing window
    Applies a maximum of 30W to the RF coil
    1/8" NPT needle valve to qualitatively control gas flow and chamber pressure
    1/8" NPT 3-way valve to quickly switch from bleeding in gas, isolating the chamber, and venting
    Weight: 45 lbs
    Size: 11" H x 18" W x 9" D

    PDC-32G (115V); PDC-32G-2 (230V)
    Basic model
    Includes a 3" diameter x 6.5" length Pyrex chamber and a removable front cover assembly
    Applies a maximum of 18W to the RF coil
    1/8" NPT needle valve to qualitatively control gas flow and chamber pressure
    1/8" NPT 3-way valve to quickly switch from bleeding in gas, isolating the chamber, and venting
    Weight: 13 lbs
    Size: 8.5" H x 10" W x 8" D

  • Optional PlasmaFlo gas mixer allows quantitative control of up to two (2) process gases and monitoring of chamber pressure
  • Optional quartz chamber and sample tray
  • Compatible vacuum pump available

Requirements

  • Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (0.83 ft3/min) and an ultimate total pressure of 200 mTorr (0.27 mbar) or less
  • For pumping nonreactive gases (air, N2, Ar), see our Standard Vacuum Pumps.
  • For pumping concentrated or pure oxygen gas, see our Oxygen Service Pumps.

Power Settings

Description PDC-32G or PDC-32G-2 PDC-001 or PDC-002
Input Power 100W 200W
  Applied to the RF Coil
Low Setting 680V DC 10 mA DC 6.8W 716V DC 10 mA DC 7.16W
Medium Setting 700V DC 15 mA DC 10.5W 720V DC 15 mA DC 10.15W
High Setting 720V DC 25 mA DC 18W 740V DC 40 mA DC 29.6W