HARRICK PLASMA

Oxygen Service Vacuum PumpsĀ 

Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (23 L/min) and an ultimate total pressure of 200 mTorr (0.27 mbar) or less

Features

Suitable for pumping concentrated oxygen gas as well as nonreactive or inert gases (e.g. Air, N2, Ar)
Does not use hydrocarbon oil (the combination of concentrated oxygen and hydrocarbon oil is an explosion hazard)

PDC-OPD (115V); PDC-OPD-2 (230V)
Dry Oxygen Service Pump
Uses no oil or fluid
Pumping speed (50/60 Hz): 6.2 m3/hr
Ultimate total pressure (gas ballast closed; 50/60 Hz): 15 mTorr
Ultimate total pressure (gas ballast open; 50/60 Hz): 38 mTorr
Motor power (50/60 Hz): 260 W
Weight: 58 lbs
Dimensions: 12" H x 17" W x 11" D
Pump inlet: includes hose, hose clamps, hose adaptor, centering ring and swing clamp to connect plasma cleaner to pump inlet
PDC-OP-OLT

Optional pump outlet connection to conduct pump exhaust to a vent hood
Includes 9 ft. length exhaust hose (other lengths may be specified)

PDC-OPE (115V); PDC-OPE-2 (230V)
Economy Dry Oxygen Service Pump
Uses no oil or fluid
Pumping speed (50/60 Hz): 3.0/3.6 m3/hr
Ultimate total pressure: 250 mTorr (pump manufacturer specification; in our lab tests, ultimate pressures of <100 mTorr were attained)
Motor power (50/60 Hz): 120 W
Weight: 21 lbs
Dimensions: 7" H x 14" W x 5.5" D
Pump inlet: includes hose, hose clamps, hose adaptor, centering ring and swing clamp to connect plasma cleaner to pump inlet
PDC-OPE-OLT

Optional pump outlet connection to conduct pump exhaust to a vent hood
Includes 9 ft. length exhaust hose (other lengths may be specified)

PDC-OPF (115V); PDC-OPF-2 (230V)
Fomblin-Based Oxygen Service Pump (not including Fomblin Fluid)
Pumping speed (50/60 Hz): 3.3/3.9 m3/hr
Ultimate total pressure (gas ballast closed): 1.5 mTorr
Ultimate total pressure (gas ballast open): 90 mTorr
Motor power (50/60 Hz): 250/300 W
Weight: 48 lbs
Dimensions: 9" H x 17" W x 6" D
Integrated inlet check valve
Pump inlet: includes hose, hose clamps, hose adaptor, centering ring and swing clamp to connect plasma cleaner to pump inlet
Pump outlet: includes oil mist filter to filter oil vapor from pump exhaust
PDC-FMB (1kg; 0.532L)
Fomblin Fluid for Fomblin-Based Vacuum Pump PDC-OPF, PDC-OPF-2
PDC-OP-OLT
Optional pump outlet connection to conduct pump exhaust to a vent hood Includes 9 ft. length exhaust hose (other lengths may be specified)