HARRICK PLASMA

Microfluidic device and method of manufacturing the same

Provided is a method of manufacturing a microfludic device in which coating film patterns made of a coupling agent are formed in microchannels. The method includes: forming the coating film patterns made of the coupling agent on a Si substrate; selectively oxidizing coupling agent-free regions of the Si substrate having thereon the coating film patterns made of the coupling agent using an oxidizing agent with an oxidation potential from 1 to 2 V; and adhering a PDMS (polydimethylsiloxane) microchannel structure to the selectively oxidized Si substrate to form the microchannels.

Shim, J., S. Lee, S. Jung, J. Namgoong, K. Yoo

US 20060257627 A1

0000-00-00

2006-11-16

2008-08-11

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