HARRICK PLASMA

Antisoiling Coatings for Antireflective Surfaces and Methods of Preparation

An antisoiling coating for an antireflective surface, particularly the outer surface of an antireflective film stack, wherein the antisoiling coating includes a fluorinated siloxane, preferably prepared by applying a coating composition of a fluorinated silane, having a number average molecular weight of at least about 1000, of formula (I): Rf-[-R1-SiY3-xR2x] y, wherein: Rf is a monovalent or divalent polyfluoropolyether group; R1 is a divalent alkylene group, arylene group, or combinations thereof; R2 is a lower alkyl group; Y is a halide, a lower alkoxy group, or a lower acyloxy group; x is 0 or 1; and y is 1 or 2.

Invie, Judith M.

Minnesota Mining and Manufacturing Company

EP1051448 B1

0000-00-00

2005-12-14

2007-08-01

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