HARRICK PLASMA

A method of forming a thin film through-hole membrane

There is provided a method of forming a thin film through-hole membrane comprising: providing a patterning structure, the patterning structure comprising a patterning substrate, a sacrificial layer and a thin film; imprinting the thin film with a patterned mold to form a thin-film through-hole membrane; and contacting the patterning structure with water to dissolve the sacrificial layer, thereby releasing the thin film through-hole membrane from the patterning structure. There is also provided a hierarchical membrane comprising the thin film through-hole membrane prepared from the method.

Wong, Him Cheng, Hong Yee Low, Virgile Viasnoff

WO2017119850A1

2017-07-13

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