HARRICK PLASMA

The Growth of Patterned Ceramic Thin Films From Polymer Precursor Solutions

Nanodevices are supposed to play an important role in the development of technology in the future. The aim of this work was to contribute to this development by providing a technique to manufacture films of inorganic functional materials that have patterns in the micrometer and submicrometer range. I showed that a) the growth of these materials from precursor solutions is a technologically simple process and b) the patterning of these films is possible as well in a technologically simple manner.

Gobel, O. F.

University of Groningen, Netherlands

2004

2008-08-11

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