HARRICK PLASMA

Deposition of CNH Materials: Plasma and Film Characterization

Compounds consisting of carbon, nitrogen and/or hydrogen atoms, hereafter called CNH materials, are very important constituents in the chemistry of everyday, and may be found in various forms. The application of CNH materials in solid thin films, however, only started in the last decades, driven by industrial demands for tribological coatings with one or more useful properties like high hardness, low friction coefficient, chemical inertness, biocompatibility, high thermal conductivity and/or optical transparency.

de Graaf, Ariël

Universiteitsdrukkerij Technische Universiteit Eindhoven

2000

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