HARRICK PLASMA

Quality Dependence of Vapor Phase-Polymerized Poly (3, 4-ethylenedioxythiophene) Nanofilm on Substrate Pre-Treatment Methods

The quality of a vapor phase-polymerized PEDOT thin film is highly dependent upon a uniform coating of an oxidant such as Fe(III)Cl3 on a SiO2 surface. The phase states of a coated oxidant solution are deeply affected by the surface character of base substrates, which can be altered via various pre-treatment methods. Therefore, in this study, in order to identify the optimum surface pre-treatment method, four different pre-treatment techniques (Ar plasma, O2 plasma, H2O/Ar plasma,and a SC-1 treatment methods), were carried out on a thermally oxidized Si-wafer surface using a uniform oxidant solution coating. And then, PEDOT films were grown on the oxidant coated surfaces using a vapor phase polymerization method. Those films were further analyzed using several thin film analyzing tools such as a contact angle analyzer, FE-SEM, an optical microscope, FT-IR, and a four point probe. From this analysis, it was discovered that the quality of a PEDOT thin film can be deeply affected by the surface pre-treatment method. In particular, a H2O/Ar plasma-treated SiO2 surface was the most uniformly coated with the oxidant solution, and the PEDOT thin films grown on the SiO2 surface showed a quite low sheet resistance value (543.84 Ω/sq). Such a high quality ultra-thin film could be a potential candidate for a transparent flexible electrode for the next-generation of display and/or photovoltaic devices.

Choi, Sangil, Jin-Hyo Boo, Honglae Sohn, Sungsoo Kim

Journal of Nanoscience and Nanotechnology

14

9005-9010

2014

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