HARRICK PLASMA

Optics-free lithography on colloidal nanocrystal assemblies

We describe a lithographic approach -Nanocrystal Plasma Polymerization (NPP)-based lithography (Figure 1) -where colloidal nanocrystal assemblies (CNAs) are used as the resist and, potentially, the active material. The patterning process is based on a change in the dispersibility of the CNAs in solvents as a result of the exposure to plasmas. Plasmas can etch the capping ligands from the exposed area. During the development step, the unexposed area of CNAs are redispersed leaving behind the patterned area.

Shaw, Santosh, Kyle J. Miller, Julien L. Colaux, Ludovico Cademartiri

Advances in Patterning Materials and Processes XXXIII

9779

97791J-1

2016

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