HARRICK PLASMA

Intrinsically Stretchable Biphasic (Solid-Liquid) Thin Metal Films

Stretchable biphasic conductors are formed by physical vapor deposition of gallium onto an alloying metal film. The properties of the photolithography-compatible thin metal films are highlighted by low sheet resistance (0.5 Ω sq-1) and large stretchability (400%). This novel approach to deposit and pattern liquid metals enables extremely robust, multilayer and soft circuits, sensors, and actuators.

Hirsch, Arthur, Hadrien O. Michaud, Aaron P. Gerratt, Séverine De Mulatier, Stéphanie P. Lacour

Adv. Mater.

28

4507-4512

2016

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